6:15 PM - 6:30 PM
[16p-412-20] Hafnium disulfide film using sulfurization from hafnium nitride for nMOSFET
Keywords:Hafnium disulfide
Presentation information
Oral presentation
13 Semiconductors » 13.5 Semiconductor devices and related technologies
[16p-412-1~20] 13.5 Semiconductor devices and related technologies
6.1と13.3と13.5のコードシェアセッションあり
Thu. Mar 16, 2017 1:15 PM - 6:30 PM 412 (412)
Keiji Ikeda(TOSHIBA), Masaharu Kobayashi(Univ. of Tokyo)