[16p-413-1~11] 13.3 絶縁膜技術

▼ [16p-413-4] Study of Thermal Oxidation Mechanism of Germanium

〇(D)Xu Wang¹、Nishimura Tomonori¹、Yajima Takeaki¹、Toriumi Akira¹ (1.Univ. of Tokyo)

キーワード：Germanium Oxidation