[16p-502-1~10] Process technology for advanced power semiconductor devices

[16p-502-6] Fabrication Process Technology for Vertical GaN Devices

〇Testu Kachi¹ (1.Nagoya Univ. IMaSS)

Keywords:GaN device, process technology

Vertical GaN devices have been recognized as very low on-resistance power devices. High performance devices with over 1kV breakdown voltage have been reported, which resulted in attracting researcher's attention. However, many problems to be solved in the fabrication process technologies remain yet. In this presentation, current status of the development of the process technologies were reviewed.