Observation of time constant dependence of interface trap distributions using local-DLTS based on scanning nonlinear dielectric microscopy

Presentation information

Oral presentation

15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

Fri. Mar 17, 2017 9:00 AM - 12:15 PM 301 (301)

9:30 AM - 9:45 AM

〇Norimichi Chinone¹, Ryoji Kosugi², Yasunori Tanaka², Shinsuke Harada², Hajime Okumura², Yasuo Cho¹ (1.Tohoku Univ., 2.AIST)

Keywords:Interface traps, Local-DLTS, SNDM