The 64th JSAP Spring Meeting, 2017

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Oral presentation

8 Plasma Electronics » 8.4 Plasma etching

[17a-313-1~10] 8.4 Plasma etching

Fri. Mar 17, 2017 9:00 AM - 11:30 AM 313 (313)

Koji Eriguchi(Kyoto Univ.)

9:15 AM - 9:30 AM

[17a-313-2] Syntheses of nano-crystals on Si substrates in etch process of CF4/Ar plasmas

〇(M1)Gento Kuroda1, Kazuo Takahashi1, Koji Nishio1 (1.Kyoto Inst. Technol.)

Keywords:Etching, Transmission Electron Microscope, nano-crystals