The 64th JSAP Spring Meeting, 2017

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8 Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[17a-315-1~15] 8.3 Plasma deposition of thin film and surface treatment

Fri. Mar 17, 2017 9:00 AM - 1:00 PM 315 (315)

Akihisa Ogino(Shizuoka Univ.), Ryuta Ichiki(Oita Univ.)

11:30 AM - 11:45 AM

[17a-315-10] Formation of High-Mobility IGZO Thin Film Transistors with Plasma Enhanced Reactive Sputter Deposition

Yuichi Setsuhara1, Masashi Endo1, 〇Kosuke Takenaka1, Giichiro Uchida1, Akinori Ebe2 (1.Osaka Univ., 2.EMD Corp.)

Keywords:IGZO