The 64th JSAP Spring Meeting, 2017

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8 Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[17a-315-1~15] 8.3 Plasma deposition of thin film and surface treatment

Fri. Mar 17, 2017 9:00 AM - 1:00 PM 315 (315)

Akihisa Ogino(Shizuoka Univ.), Ryuta Ichiki(Oita Univ.)

12:30 PM - 12:45 PM

[17a-315-14] Modification of Yttrium Oxide Nanophosphors by Atmospheric Pressure Plasma

〇Kenta Sekiya1, Kamimura Masao2, Soga Kohei2, Kitano Katsuhisa3 (1.Dept. Mater. Sci. & Tech., Tokyo Univ. of Sci., 2.IFC, Tokyo Univ. of Sci., 3.Eng. Osaka Univ.)

Keywords:plasma, CVD, modification