[17a-315-1~15] 8.3 Plasma deposition of thin film and surface treatment

△ [17a-315-6] Spectroscopic Investigations in Water Plasma Ashing Process for Polymer Films with Different Chemical Structures

〇(M1C)Hiroaki Suzuki¹, Takuya Kitano¹, Arufua Shiota¹, Tatsuo Ishijima¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹, Takashi Nishiyama², Hideo Horibe² (1.Kanazawa Univ., 2.Osaka City Univ.)

Keywords:water plasma, resists removal, Ashing