The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[17p-211-1~12] 16.3 Bulk, thin-film and other silicon-based solar cells

Fri. Mar 17, 2017 1:30 PM - 4:45 PM 211 (211)

Nobuyuki Matsuki(Kanagawa Univ.), Shinsuke Miyajima(Tokyo Institute of Technology)

3:45 PM - 4:00 PM

[17p-211-9] Non-Contact Measurement of Flat-Band Voltage Using Combination of a Laser Terahertz Emission Microscope (LTEM) and Corona Discharge

Akira Ito1, Toshimitsu Mochizuki3, Yasuhiro Takase1, Hidetoshi Nakanishi1, Katsuto Tanahashi3, Iwao Kawayama2, Masayoshi Tonouchi2, Katsuhiko Shirasawa3, Hidetaka Takato3 (1.SCREEN, 2.ILE Osaka Univ., 3.FREA, AIST)

Keywords:solar cell, terahertz wave, passivation layer

We measured SiOx/c-Si using laser terahertz emission microscope (LTEM). We used corona discharge instead of ITO electrodes used in conventional evaluation. We can detect change of band-bending using corona discharge. Therefore when LTEM is combined with corona discharge, flat-band voltage which is important for evaluation of passivation layer can be measured without ITO electrodes in a non-contact using LTEM.