[17p-211-1~12] 16.3 Bulk, thin-film and other silicon-based solar cells

[17p-211-9] Non-Contact Measurement of Flat-Band Voltage Using Combination of a Laser Terahertz Emission Microscope (LTEM) and Corona Discharge

〇Akira Ito¹, Toshimitsu Mochizuki³, Yasuhiro Takase¹, Hidetoshi Nakanishi¹, Katsuto Tanahashi³, Iwao Kawayama², Masayoshi Tonouchi², Katsuhiko Shirasawa³, Hidetaka Takato³ (1.SCREEN, 2.ILE Osaka Univ., 3.FREA, AIST)

Keywords:solar cell, terahertz wave, passivation layer

We measured SiO_x/c-Si using laser terahertz emission microscope (LTEM). We used corona discharge instead of ITO electrodes used in conventional evaluation. We can detect change of band-bending using corona discharge. Therefore when LTEM is combined with corona discharge, flat-band voltage which is important for evaluation of passivation layer can be measured without ITO electrodes in a non-contact using LTEM.