The 64th JSAP Spring Meeting, 2017

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CS Code-sharing session » CS.2 6.1/13.3/13.5 Code-sharing Session

[17p-304-1~15] CS.2 6.1/13.3/13.5 Code-sharing Session

Fri. Mar 17, 2017 1:00 PM - 5:00 PM 304 (304)

Masumi Saitoh(TOSHIBA), Hironori Fujisawa(Univ. of Hyogo)

1:00 PM - 1:15 PM

△ [17p-304-1] Growth of epitaxial Y2O3-doped HfO2 thin films by Sputtering method and their characterization

〇(M1)Taisei Suzuki1, Takanori Mimura2, Takao Shimizu3, Hiroshi Uchida4, Hiroshi Funakubo1,2,3 (1.Tokyo Tech. SMCT, 2.Tokyo Tech. IGS, 3.Tokyo Tech. MECS, 4.Sophia Univ. FST)

Keywords:hafnium, ferroelectricthinfilm