The 64th JSAP Spring Meeting, 2017

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CS Code-sharing session » CS.2 6.1/13.3/13.5 Code-sharing Session

[17p-304-1~15] CS.2 6.1/13.3/13.5 Code-sharing Session

Fri. Mar 17, 2017 1:00 PM - 5:00 PM 304 (304)

Masumi Saitoh(TOSHIBA), Hironori Fujisawa(Univ. of Hyogo)

4:15 PM - 4:30 PM

[17p-304-13] Direct Observation of Negative Capacitance of HfZrO2 Film for Negative Capacitance FET

〇Nozomu Ueyama1, Masaharu Kobayashi1, Toshiro Hiramoto1 (1.IIS. Univ. of Tokyo)

Keywords:Ferroelectric, Negative Capacitance