The 64th JSAP Spring Meeting, 2017

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Oral presentation

CS Code-sharing session » CS.2 6.1/13.3/13.5 Code-sharing Session

[17p-304-1~15] CS.2 6.1/13.3/13.5 Code-sharing Session

Fri. Mar 17, 2017 1:00 PM - 5:00 PM 304 (304)

Masumi Saitoh(TOSHIBA), Hironori Fujisawa(Univ. of Hyogo)

1:15 PM - 1:30 PM

△ [17p-304-2] Stability of ferroelectric phase in epitaxial HfO2-based films: RE2O3-HfO2 vs ZrO2-HfO2

〇Takanori Mimura1, Kiriha Katayama1, Takao Shimizu2, Takanori Kiguchi3, Akihiro Akama3, Toyohiko Konno3, Osami Sakata4, Hiroshi Funakubo1,2,5 (1.Tokyo Tech. IGS, 2.Tokyo Tech. MECS, 3.Tohoku Univ. IMR, 4.NIMS, 5.Tokyo Tech. DMSE)

Keywords:HfO2, ferroelectric film