[17p-315-1~12] 8.1 Plasma production and control

△ [17p-315-11] Density Profile Control of Microwave Plasma Generated by Cylindrical Cavity

〇(M1)Masaya Hotta¹, Yuichi Hasegawa¹, Daisuke Ogawa¹, Keiji Nakamura¹, Soonam Park², Dima Lubomirsky², Satoru Kobayashi², Hideo Sugai³ (1.Chubu Univ., 2.Applied Materials, 3.NISRI)

Keywords:microwave plasma, cylindrical cavity