[17p-P3-1~22] 15.4 III-V-group nitride crystals

[17p-P3-11] VIII ratio effects on morphology and crystal structure of Al-rich AlGaN films grown by MOVPE

〇Shuichi Sakai¹, Yuya Kondo¹, Takahiro Kobayashi¹, Yuta Mizukami¹, Kazuo Uchida¹, Shinji Nozaki¹ (1.UEC)

Keywords:III-Nitride Semiconductors, MOVPE, UVC-LED