Hideyuki Akazawa

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 1:30 PM - 4:15 PM 234A (234-1)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[19p-234A-1~10] 7.3 Micro/Nano patterning and fabrication

2:00 PM - 2:15 PM

[19p-234A-3] Realization of polyimide / Al junction using sputtering effects of Ar fast atom beam

〇(M2)Hideyuki Akazawa¹, Liang Jianbo¹, Matsubara Moeko², Dhamrin Marwan², Nishio Yoshitaka², Shigekawa Naoteru¹ (1.Osaka City Univ., 2.Toyo Aluminium K.K.)

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