Yasuhisa Sano

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Speaker, Author, Co-Author

Tue. Sep 18, 2018 1:30 PM - 6:00 PM 146 (Reception Hall)

Symposium (Oral)
| Symposium
| New Process Technology of Nitride Semiconductors

[18p-146-1~8] New Process Technology of Nitride Semiconductors

3:00 PM - 3:30 PM

[18p-146-4] Damage-free Polishing of GaN Substrate Using Catalyst-referred Etching

〇Yasuhisa Sano¹, Kenta Arima¹, Kazuto Yamauchi¹ (1.Osaka Univ.)