Shota Komago

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Speaker, Author, Co-Author

Tue. Sep 18, 2018 1:15 PM - 5:00 PM 235 (3Ｆ_Lounge２)

Oral presentation
| 15 Crystal Engineering
| 15.5 Group IV crystals and alloys

[18p-235-1~14] 15.5 Group IV crystals and alloys

4:15 PM - 4:30 PM

△ [18p-235-12] Strain Evaluation of C or Ge implanted and Laser-annealed SiGe Thin Layers

〇Shota Komago¹, Tatsumi Murakami¹, Kazutoshi Yoshioka¹, Ryo Yokogawa^1,2, Naomi Sawamoto¹, John Borland³, Takashi Kuroi⁴, Toshiyuki Tabata⁵, Karim Huet⁵, Naoto Horiguchi⁶, Atsushi Ogura¹ (1.Meiji Univ., 2.JSPS Research Fellow DC, 3.J.O.B. Technologies, 4.Nissin Ion Equipment, 5.LASSE/Screen, 6.IMEC)

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