Masato Ohmori

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Speaker, Author, Co-Author

Tue. Sep 18, 2018 4:00 PM - 6:00 PM PA (Event Hall)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[18p-PA6-1~30] 13.7 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[18p-PA6-1] Activation of ion-implanted Mg in GaN by flash lamp annealing

〇Masato Ohmori¹, Takahiro Yamada², Hideaki Tanimura², Shinichi Kato², Naotaka Iwata³, Kouji Shiozaki¹ (1.Nagoya Univ. IMaSS, 2.SCREEN Semiconductor Solutions Co., Ltd., 3.Toyota Tech. Inst.)

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