Shota Otobe

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Speaker, Author, Co-Author

Tue. Sep 18, 2018 1:30 PM - 3:30 PM PB (Shirotori Hall)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[18p-PB2-1~7] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

△ [18p-PB2-2] A Study on 3-axis Fully-Differential Au-Proof-Mass MEMS Accelerometer with Segmented Capacitance Detection Method

〇Shota Otobe¹, Yamane Daisuke¹, Konishi Toshifumi², Safu Teruaki², Iida Shin-ichi², Ito Hiroyuki¹, Ishihara noboru¹, Machida Katsuyuki¹, Masu Kazuya¹ (1.Tokyo Institute of Technology, 2.NTT AT)

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