1:30 PM - 3:30 PM
△ [18p-PB2-2] A Study on 3-axis Fully-Differential Au-Proof-Mass MEMS Accelerometer with Segmented Capacitance Detection Method
Keywords:MEMS accelerometer, Fully-differential, SCD
Microelectromechanical systems (MEMS) accelerometers with the resolution below 1 mG (G = 9.8 m/s2) can be used for various applications such as space, human motion monitoring, inertial navigation, and so on. MEMS accelerometer noise is dominated by Brownian noise, which is inversely proportional to the mass. We have developed a single Au proof-mass MEMS accelerometer fabricated by multi-layer metal technology. High-density of gold can reduce the noise when compared to conventional materials, such as silicon. For tri-axis design, we have reported segmented capacitance detection (SCD) for high resolution Au proof-mass MEMS accelerometers. The SCD can be realized by the segmented electrodes (SE) which simplify the MEMS device structure. In this work, we propose a tri-axis fully-differential electrodes structure MEMS accelerometer with SCD for sub-1mG resolution.