Shinji Yasue

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 9:00 AM - 12:15 PM 146 (Reception Hall)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[19a-146-1~12] 15.4 III-V-group nitride crystals

9:30 AM - 9:45 AM

[19a-146-3] AlN Molar Fraction Dependence of TMAH Wet Etching on AlGaN

〇(M1)Shinji Yasue¹, Kosuke Sato^1,3, Yuta Kawase¹, Junya Ikeda¹, Yusuke Sakuragi¹, Sho Iwayama¹, Motoaki Iwaya¹, Satoshi Kamiyama¹, Tetsuya Kamiyama¹, Isamu Akasaki^1,2 (1.Meijo Univ., 2.Nagoya Univ., 3.Asahi-Kasei)

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