Hiroto Kobayashi

→ Search for Hiroto Kobayashi in Google Scholar

Speaker, Author, Co-Author

Wed. Sep 19, 2018 9:00 AM - 12:00 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[19a-233-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:00 AM - 10:15 AM

△ [19a-233-4] Second-Phase Evaluation of Minority Carrier Lifetime in FZ-Si Affected by Si-IGBT Process

〇(M2)Hiroto Kobayashi¹, Ryo Yokogawa^1,2, Kosuke Kinoshita¹, Yoichiro Numazawa¹, Atsushi Ogura¹, Shin-ichi Nishizawa³, Takuya Saraya⁴, Kazuo Ito⁴, Toshihiko Takakura⁴, Shinichi Suzuki⁴, Munetoshi Fukui⁴, Kiyoshi Takeuchi⁴, Toshiro Hiramoto⁴ (1.Meiji Univ., 2.JSPS Research Fellow DC, 3.Kyushu Univ., 4.Tokyo Univ.)

▲