Hiroyuki Tsubota

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 1:30 PM - 5:45 PM 131 (131+132)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[19p-131-1~15] 15.7 Crystal characterization, impurities and crystal defects

2:00 PM - 2:15 PM

[19p-131-3] Reaction of silicon with gaseous CO generated from graphite material parts in Czochralski silicon furnace

〇Hiroyuki Tsubota¹, Yuta Nagai¹, Yoshiaki Abe¹, Hisashi Matsumura¹ (1.GlobalWafers Japan)