2:00 PM - 2:15 PM
[19p-131-3] Reaction of silicon with gaseous CO generated from graphite material parts in Czochralski silicon furnace
Keywords:Crystal growth, Silicon, Carbon concentration
Oral presentation
15 Crystal Engineering » 15.7 Crystal characterization, impurities and crystal defects
Wed. Sep 19, 2018 1:30 PM - 5:45 PM 131 (131+132)
Kentaro Kutsukake(Nagoya Univ.), Toshinori Taishi(Shinshu Univ.), Yasuo Shimizu(Tohoku Univ.)
2:00 PM - 2:15 PM
Keywords:Crystal growth, Silicon, Carbon concentration