Satoshi Matsuno

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 1:45 PM - 6:45 PM 436 (436)

Oral presentation
| 13 Semiconductors
| 13.2 Exploratory Materials, Physical Properties, Devices

[19p-436-1~17] 13.2 Exploratory Materials, Physical Properties, Devices

3:30 PM - 3:45 PM

[19p-436-7] Characterizations of BaSi₂ films by sputtering with various Ba-to-Si deposited atomic ratios

〇Satoshi Matsuno¹, Ryota Takabe¹, Masami Mesuda², Hideto Kuramochi², Kaoru Toko¹, Takashi Suemasu¹ (1.Univ. Tsukuba, 2.Tosoh corp.)