The 79th JSAP Autumn Meeting, 2018

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[19p-436-1~17] 13.2 Exploratory Materials, Physical Properties, Devices

Wed. Sep 19, 2018 1:45 PM - 6:45 PM 436 (436)

Haruhiko Udono(Ibaraki Univ.), Yoshikazu Terai(Kyushu Inst. of Tech.), Kenji Yamaguchi(QST), Kosuke Hara(Univ. of Yamanashi)

3:30 PM - 3:45 PM

[19p-436-7] Characterizations of BaSi2 films by sputtering with various Ba-to-Si deposited atomic ratios

〇Satoshi Matsuno1, Ryota Takabe1, Masami Mesuda2, Hideto Kuramochi2, Kaoru Toko1, Takashi Suemasu1 (1.Univ. Tsukuba, 2.Tosoh corp.)

Keywords:solar cells, thin films, sputtering