Yuri Mizukawa

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:45 AM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20a-233-1~9] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:30 AM - 9:45 AM

[20a-233-1] Visualization of Temperature Distribution in Molten Silicon by Atmospheric Pressure Thermal Plasma Jet

〇Yuri Mizukawa¹, Hanafusa Hiroaki¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)