Muhammad Arif Razali

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:45 AM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20a-233-1~9] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:00 AM - 10:15 AM

▼ [20a-233-3] Change of Raman Scattering as a Function of Laser Power in Si-Films Crystallized by CLC

〇(M2)Muhammad Arif Razali, Nobuo Sasaki^2,1, Yasuaki Ishikawa¹, Yukiharu Uraoka¹ (1.Nara Institute of Science and Technology, 2.Sasaki Consulting)