Kaname Imokawa

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:45 AM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20a-233-1~9] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:15 AM - 10:30 AM

[20a-233-4] Electrical Properties of LTPS Thin Films after Excimer Laser Doping with H3PO4 Thin Films

〇Kaname Imokawa^1,2, Nozomu Tanaka¹, Akira Suwa^1,2, Daisuke Nakamura¹, Taizoh Sadoh¹, Tetsuya Goto³, Hiroshi Ikenoue^1,2 (1.Kyushu Univ., 2.Department of Gigaphoton Next GLP, Kyushu Univ., 3.Tohoku Univ.)

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