Ryusuke Nakamura

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:45 AM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20a-233-1~9] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:00 AM - 11:15 AM

[20a-233-7] Crystallization of amorphous Ge aged at room temperature by flash-lamp annealing

〇Ryusuke Nakamura¹, Masayuki Okugawa¹, Akira Heya², Naoto Matsuo², Hidehiro Yasuda³ (1.Osaka Pref. Univ., 2.Univ. of Hyogo, 3.Osaka Univ.)