Masayuki Okugawa

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:45 AM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20a-233-1~9] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:15 AM - 11:30 AM

[20a-233-8] Crystallization of sputter-deposited amorphous Si-Ge films

〇(D)Masayuki Okugawa¹, Ryusuke Nakamura¹, Hiroshi Numakura¹, Manabu Ishimaru², Hidehiro Yasuda³ (1.Osaka Pref. Univ., 2.Kyushu Inst. Univ., 3.Osaka Univ.)

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