Kanna Aoki

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:45 AM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20a-233-1~9] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:30 AM - 11:45 AM

[20a-233-9] Micro rolling process on a silicon wafer surface

〇Kanna Aoki¹, Keita Ishiguro², Masaki Denokami², Yuya Tanahashi², Kentaro Furusawa¹, Norihiko Sekine¹, Tadafumi Adschiri³, Minoru Fujii² (1.NICT, 2.Kobe Univ., 3.Tohoku Univ.)

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