Tomotaka Kido

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 12:00 PM 234A (234-1)

Oral presentation
| 21 Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[20a-234A-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

10:00 AM - 10:15 AM

[20a-234A-5] Low Temperature Formation of ZnO Films by Plasma-Assisted Mist-CVD

〇Tomotaka Kido¹, Tomoki Mikuriya¹, Rena Sugino¹, Yasutaka Nisi², Makoto Nakazumi², Koichiro Iwahori², Zenji Yatabe^1,3, Takao Namihira^1,4, Yusui Nakamura^1,5,6 (1.GSST Kumamoto Univ., 2.Nikon Corporation, 3.POIE Kumamoto Univ., 4.IPPS Kumamoto Univ., 5.FAST Kumamoto Univ., 6.Phoenics)

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