Kazunori Koga

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 12:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-438-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

11:45 AM - 12:00 PM

[20a-438-11] Effects of deposition precursors on Si network orderliness

〇Kazunori Koga¹, Kazuma Tanaka¹, Hisayuki Hara¹, Liu Shi¹, Shinya Nakano¹, Daisuke Yamashita¹, Kunihiro Kamataki¹, Naho Itagaki¹, Masaharu Shiratani¹ (1.Kyushu Univ.)

Thu. Sep 20, 2018 9:00 AM - 12:00 PM 437 (437)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma nanotechnology

[20a-437-1~11] 8.3 Plasma nanotechnology

9:00 AM - 9:15 AM

[20a-437-1] Study on interaction fluctuation by collision analysis of two fine particles in plasmas

〇Kazunori Koga¹, Hiroshi Ohtomo¹, Ren Zhou¹, Daisuke Yamashita¹, Kunihiro Kamataki¹, Naho Itagaki¹, Masaharu Shiratani¹ (1.Kyushu Univ.)

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