Nobuyoshi Saito

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 12:15 PM CE (Century Hall)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[20a-CE-1~12] 13.5 Semiconductor devices and related technologies

12:00 PM - 12:15 PM

[20a-CE-12] Demonstration of Ultralow (<10^-20 A/um) Off Leakage Current In-Zn-O Channel Transistor with EOT of 6.2nm

〇Nobuyoshi Saito¹, Tomoaki Sawabe¹, Junji Kataoka¹, Ueda Tomomasa¹, Tezuka Tsutomu¹, Ikeda Keiji¹ (1.Toshiba Memory Corp.)