Takashi Matsukawa

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 12:15 PM CE (Century Hall)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[20a-CE-1~12] 13.5 Semiconductor devices and related technologies

10:45 AM - 11:00 AM

[20a-CE-7] Parasitic resistance characterization of FinFETs doped by solid-diffusion of phosphorus

〇Takashi Matsukawa¹, Takahiro Mori¹, Yoshihiro Sawada², Yohei Kinoshita², Yongxun Liu¹, Meishoku Masahara¹ (1.AIST, 2.Tokyo Ohka Kogyo)