Miyu Haruguchi

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 6:00 PM 221C (2Ｆ_Lounge1)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[20p-221C-1~15] 15.6 Group IV Compound Semiconductors (SiC)

5:30 PM - 5:45 PM

[20p-221C-14] Corrosion resistance of AlN to chlorine trifluoride gas for SiC etching

〇Miyu Haruguchi¹, Ryohei Kawasaki¹, Hitoshi Habuka¹, Takahashi Yoshinao² (1.Yokohama Nat. Univ, 2.Kanto Denka Kogyo)