Kimihiro Norizawa

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:30 PM - 6:00 PM 233 (233)

Symposium (Oral)
| Symposium
| Advanced ion microscopy for future nanoelectronics materials and devices

[20p-233-1~10] Advanced ion microscopy for future nanoelectronics materials and devices

3:45 PM - 4:15 PM

▲ [20p-233-6] Nano Patterning and Observation Using Helium Ion Microscope, Usage Examples at Osaka University

〇Kimihiro Norizawa¹ (1.ISIR, Osaka Univ.)