The 79th JSAP Autumn Meeting, 2018

Presentation information

Symposium (Oral)

Symposium » Advanced ion microscopy for future nanoelectronics materials and devices

[20p-233-1~10] Advanced ion microscopy for future nanoelectronics materials and devices

Thu. Sep 20, 2018 1:30 PM - 6:00 PM 233 (233)

Reo Kometani(Univ. of Tokyo), Shinichi Ogawa(AIST)

3:45 PM - 4:15 PM

[20p-233-6] Nano Patterning and Observation Using Helium Ion Microscope, Usage Examples at Osaka University

Kimihiro Norizawa1 (1.ISIR, Osaka Univ.)

Keywords:helium ion microscope, nanofabrication, focused ion beam

Helium Ion Microscope has been installed to Nanotechnology Open Facilities at Osaka University in 2014 and is operating as a shared equipment in MEXT Nanotechnology Platform project. In this presentation, examples of use of helium ion microscope at Osaka University will be introduced.