The 79th JSAP Autumn Meeting, 2018

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Symposium (Oral)

Symposium » Advanced ion microscopy for future nanoelectronics materials and devices

[20p-233-1~10] Advanced ion microscopy for future nanoelectronics materials and devices

Thu. Sep 20, 2018 1:30 PM - 6:00 PM 233 (233)

Reo Kometani(Univ. of Tokyo), Shinichi Ogawa(AIST)

4:15 PM - 4:45 PM

▲ [20p-233-7] Energy Analysis of H3+ Ion Beam Emitted from Gas field ionization source

〇Shinichi Matsubara1, Hiroyasu Shichi1, Tomihiro Hashizume1, Anto Yasaka2 (1.Hitachi, Ltd., 2.Hitachi High-Tech Science Co.)

Keywords:Ion beam, Gas field ion source, GFIS