[20p-233-1~10] Advanced ion microscopy for future nanoelectronics materials and devices

▲ [20p-233-6] Nano Patterning and Observation Using Helium Ion Microscope, Usage Examples at Osaka University

〇Kimihiro Norizawa¹ (1.ISIR, Osaka Univ.)

Keywords:helium ion microscope, nanofabrication, focused ion beam

Helium Ion Microscope has been installed to Nanotechnology Open Facilities at Osaka University in 2014 and is operating as a shared equipment in MEXT Nanotechnology Platform project. In this presentation, examples of use of helium ion microscope at Osaka University will be introduced.