Mamoru Furuta

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:30 PM - 6:30 PM 234A (234-1)

Oral presentation
| 21 Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[20p-234A-1~18] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

5:00 PM - 5:15 PM

[20p-234A-13] Low-temperature Process for IGZO TFT with Ar+O₂+H₂ sputtered IGZO channel

〇Mamoru Furuta¹, S G Mahadhi Aman¹, Yusaku Magari¹, Kenta Shimpo¹, Daichi Koretomo¹ (1.Kochi Univ. of Tech.)