Yuuta Yoshikawa

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 7:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20p-438-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

4:45 PM - 5:00 PM

[20p-438-12] [Young Scientist Presentation Award Speech] First-principles-based prediction of the local structures damaged by plasma exposures (2)

〇Yuuta Yoshikawa¹, Koji Eriguchi¹ (1.Kyoto Univ.)