Tomohiro Kuyama

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 7:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20p-438-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

5:00 PM - 5:15 PM

△ [20p-438-13] Effects of Nitrogen Ambient Annealing on the Recovery of Plasma-induced Defect Structures in Silicon Nitride Films

〇Tomohiro Kuyama¹, Yuta Yoshikawa¹, Yoshihiro Sato¹, Keiichiro Urabe¹, Koji Eriguchi¹ (1.Kyoto Univ.)