Yoshifumi Zaizen

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 7:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20p-438-1~21] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

5:45 PM - 6:00 PM

[20p-438-16] Mechanism of fluorine-enhanced diffusion in III-V semiconductor compounds

〇Yoshifumi Zaizen¹, Fukasawa Masanaga¹, Minari Hideki¹ (1.Sony Semiconductor Solutions Coporation)