Yoshinobu Matsuda

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 4:00 PM - 6:00 PM PA (Event Hall)

Poster presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[20p-PA5-1~11] 8.1 Plasma production and diagnostics

4:00 PM - 6:00 PM

[20p-PA5-5] Development of retarding field energy analyzer for measuring energy distribution of ions incident on a substrate

〇Yoshinobu Matsuda¹, Masaki Ishiba¹, Tomohiro Furusato¹, Takahiko Yamashita¹ (1.Nagasaki Univ.)

Fri. Sep 21, 2018 1:30 PM - 3:30 PM PB (Shirotori Hall)

Poster presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[21p-PB1-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

1:30 PM - 3:30 PM

[21p-PB1-1] Short gap RF-magnetron sputtering deposition of Ga-doped ZnO film on glass substrate with buffer layer

〇Yoshinobu Matsuda¹, Naoki Matsuo¹, Masaki Ishiba¹, Tomohiro Furusato¹, Takahiko Yamashita¹ (1.Nagasaki Univ.)