Takashi Onaya

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 9:00 AM - 11:30 AM 145 (Reception Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[21a-145-1~9] 13.3 Insulator technology

10:30 AM - 10:45 AM

[21a-145-6] [Young Scientist Presentation Award Speech] Fabrication technique of ferroelectric Hf_xZr₁_-xO₂ thin films using nano-ZrO₂ nucleation layer

〇Takashi Onaya^1,2,3, Toshihide Nabatame², Naomi Sawamoto¹, Ohi Akihiko², Naoki Ikeda², Takahiro Nagata², Atsushi Ogura¹ (1.Meiji Univ., 2.NIMS, 3.JSPS Research Fellow DC)