Yuki Mori

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 9:00 AM - 11:30 AM 145 (Reception Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[21a-145-1~9] 13.3 Insulator technology

10:45 AM - 11:00 AM

[21a-145-7] Impact of ramp-up/down rate in RTA on HfO₂ ferroelectricity

〇Yuki Mori¹, Tomonori Nishimura¹, Takeaki Yajima¹, Shinji Migita², Akira Toriumi¹ (1.Univ. of Tokyo, 2.AIST)