Koji Usuda

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 9:00 AM - 11:30 AM 145 (Reception Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[21a-145-1~9] 13.3 Insulator technology

11:00 AM - 11:15 AM

[21a-145-8] Chemical state analysis of ferroelectric HfSiO MIM structure by HAXPES evaluation

〇Koji Usuda¹, Yuuichi Kamimuta¹, Shoichi Kabuyanagi¹, Masahiko Yoshiki², Mitsuhiro Tomita¹, Saitoh Masumi¹ (1.Toshiba Memory, 2.Toshiba R&D Center)